Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning

Volume 9

Mittal, Kashmiri L.; Kohli, Rajiv

William Andrew Publishing

11/2016

212

Dura

Inglês

9780323431576

15 a 20 dias

Descrição não disponível.

Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants Chapter 3. Laser-Induced Spray Jet Cleaning Chapter 4. Brush Scrubbing for Post-CMP Cleaning Chapter 5. Contamination Removal From UV and EUV Photomasks Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics

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