Thin Films and Epitaxy

Thin Films and Epitaxy

A. Basic Techniques

Hurle, Donald T.J.

Elsevier Science & Technology

12/1994

1086

Dura

Inglês

9780444815569

0444815562

15 a 20 dias

1260

Reviews the techniques of halide, organometallic and molecular beam epitaxy, liquid and solid phase epitaxial techniques, rapid solidification by pulsed laser annealing and laser ablation of oxide films. This book also covers the underlying mechanisms and dynamics of epitaxial growth processes including structural, kinetic and transport effects.
Part A. Basic Techniques 1. Halogen transport epitaxy (H. Watanabe). 2. Levitation epitaxy (H.M. Cox). 3. The principles and practice of organometallic vapor phase epitaxy (D.W. Kisker, T.F. Kuech). 4. Principles of molecular beam epitaxy (C.T. Foxon). 5. Molecular beam epitaxy with gaseous source (H. Hirayama, H. Asahi). 6. Liquid phase epitaxy (M.B. Small, E.A. Giess, R. Ghez). 7. Solid phase epitaxy (G.L. Olson, J.A. Roth). 8. Rapid solidification of silicon and some silicides by pulsed laser annealing (P. Baeri, S.U. Campisano). 9. Pulsed laser ablation-deposition of multicomponent oxide thin films: basic laser ablation and deposition processes and influence on film characteristics (O. Auciello). 10. Growth of diamond films from the vapour phase (B.V. Spitsyn).Part B. Growth Mechanisms and Dynamics 11. Kinetic processes in vapour growth (A.A. Chernov). 12. Organometallic vapor phase epitaxy reaction kinetics (G.B. Stringfellow). 13. Transport phenomena in vapor phase epitaxy reactors (K.F. Jensen). 14. Atomic layer epitaxy (T. Suntola). 15. Nucleation and surface diffusion in molecular beam epitaxy (T. Nishinaga). 16. Migration-enhanced epitaxy (Y. Horikoshi). 17. Metalorganic vapour phase epitaxial growth of ultra-thin quantum wells and heterostructures (L. Samuelson, W. Seifert). 18. Photoassisted epitaxy (S.J.C. Irvine). 19. In situ optical studies of epitaxial growth (C. Pickering). 20. Atomic mechanisms in semiconductor liquid phase epitaxy (E. Bauser). 21. Artificial epitaxy (graphoepitaxy) (E.I. Givargizov). 22. Structural effects in coherent epitaxial semiconductor films (A. Zunger).
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